Tungsten hexafluoride (WF6) is an inorganic compound with the chemical formula WF6. It is a colorless gas at room temperature and pressure. This compound is stable at high temperatures, but may react when exposed to light or in contact with water. Tungsten hexafluoride is soluble in organic solvents. Tungsten hexafluoride is an excellent semiconductor material mainly used in the field of integrated circuit manufacturing. Due to its excellent electrical performance, tungsten hexafluoride is widely used in chemical vapor deposition processes, which are used to deposit and stack conductive films and metal wiring materials in large-scale integrated circuits. In addition, tungsten hexafluoride is also applied as the foundation of the metal tungsten chemical vapor deposition (CVD) process technology and can be used for chemical vapor deposition of tungsten. In addition to its application in the electronic industry, tungsten hexafluoride is also widely used in non electronic fields. For example, using CVD technology to generate hard tungsten carbide on the surface of steel can improve the surface properties of steel. In addition, tungsten hexafluoride can also be used as a raw material for fluorinating agents, polymerization catalysts, and optical materials, for manufacturing low resistance, high melting point interconnects, and certain tungsten components such as tungsten tubes and clamp pots.
1. Character: Colorless gas or light yellow liquid or solid, solid is easily deliquescent white crystal, and emits smoke in contact with humid air
2. Density (g/mLat 25 ° C): Undetermined
3. Relative vapor density (g/mL, air=1): Undetermined
4. Melting point (º C): 2.3
5. Boiling point (º C, atmospheric pressure): 17.5
6. Boiling point (º C, 20mmHg): Undetermined
7. Refractive index (n20/D): Undetermined
8. Flash point (º C): Undetermined
9. Specific rotation (º): Undetermined
10. Self ignition point or ignition temperature (º C): Not determined
11. Vapor pressure (mmHg, 20 º C): Undetermined
12. Saturated vapor pressure (kPa, 114.4 º C): Undetermined
13. Heat of combustion (KJ/mol): Undetermined
14. Critical temperature (º C): 171
15. Critical pressure (MPa): 0.45
2. Density (g/mLat 25 ° C): Undetermined
3. Relative vapor density (g/mL, air=1): Undetermined
4. Melting point (º C): 2.3
5. Boiling point (º C, atmospheric pressure): 17.5
6. Boiling point (º C, 20mmHg): Undetermined
7. Refractive index (n20/D): Undetermined
8. Flash point (º C): Undetermined
9. Specific rotation (º): Undetermined
10. Self ignition point or ignition temperature (º C): Not determined
11. Vapor pressure (mmHg, 20 º C): Undetermined
12. Saturated vapor pressure (kPa, 114.4 º C): Undetermined
13. Heat of combustion (KJ/mol): Undetermined
14. Critical temperature (º C): 171
15. Critical pressure (MPa): 0.45
Precautions for operation: Enclosed operation, providing sufficient local ventilation. Operators must undergo specialized training and strictly adhere to operating procedures. It is recommended that operators wear self priming filter type gas masks (full face masks), sealed gas protective clothing, and rubber gloves. Prevent gas or vapor leakage into the air of the workplace. Avoid contact with active metal powder. Pay particular attention to avoiding contact with water.
Storage conditions：Store in a closed, cool and dry place, ensuring good ventilation
Transportation precautions: During railway transportation, the dangerous goods loading table in the “Dangerous Goods Transport Rules” of the Ministry of Railways should be strictly followed for loading. When transporting steel cylinders, it is necessary to wear the safety helmet on the cylinder. Steel cylinders are generally placed flat, and the bottle mouth should be facing the same direction and not crossed; The height should not exceed the protective fence of the vehicle, and triangular wooden pads should be used to secure it to prevent rolling. It is strictly prohibited to mix and transport with active metal powder, edible chemicals, etc. Transportation should be carried out in the morning and evening in summer to prevent direct sunlight exposure. During road transportation, it is necessary to follow the prescribed route and stop in residential and densely populated areas. It is prohibited to slide during railway transportation.
