Excimer laser gases are typically composed of rare gases and halogen gases, such as xenon fluoride (XeF). These gases are activated under specific conditions to form quasi molecules. The wavelength of excimer lasers is usually in the range of ultraviolet to visible light.
Excimer lasers have been widely used in industrial, medical, and scientific fields, as follows:
Industrial field: In semiconductor lithography and flat panel display manufacturing, excimer lasers are used to produce finer and clearer display effects. For example, semiconductor lithography mainly uses 248nm KrF and 193nm ArF excimer lasers, while panel displays that low-temperature polycrystalline silicon annealing mainly uses 308nm XeCl excimer lasers.
Medical field: Excimer lasers play a crucial role in ophthalmic diopter correction surgery, such as correcting myopia, hyperopia, astigmatism, etc. In addition, it is also used to treat skin diseases such as vitiligo, psoriasis, allergic dermatitis, as well as cardiovascular diseases such as coronary heart disease, peripheral vascular disease, heart valve disease, congenital heart disease, and hypertrophic cardiomyopathy.
Research field: The characteristics of excimer lasers make them the laser with the highest output power in the ultraviolet band, providing important technical support for scientific research experiments and data analysis.
In addition, the application of excimer laser gases in the lithography and display industries has been relatively mature and widely recognized in the market.
Industrial field: In semiconductor lithography and flat panel display manufacturing, excimer lasers are used to produce finer and clearer display effects. For example, semiconductor lithography mainly uses 248nm KrF and 193nm ArF excimer lasers, while panel displays that low-temperature polycrystalline silicon annealing mainly uses 308nm XeCl excimer lasers.
Medical field: Excimer lasers play a crucial role in ophthalmic diopter correction surgery, such as correcting myopia, hyperopia, astigmatism, etc. In addition, it is also used to treat skin diseases such as vitiligo, psoriasis, allergic dermatitis, as well as cardiovascular diseases such as coronary heart disease, peripheral vascular disease, heart valve disease, congenital heart disease, and hypertrophic cardiomyopathy.
Research field: The characteristics of excimer lasers make them the laser with the highest output power in the ultraviolet band, providing important technical support for scientific research experiments and data analysis.
In addition, the application of excimer laser gases in the lithography and display industries has been relatively mature and widely recognized in the market.
Our company mainly produces the following conventional products, and the company can also customize products according to the special needs of customers
| Item | Name | Main chemical composition concentration | Form | Packaging system | Packaging specification |
| 1 | Laser Gas（0.95%F2/1.25%Kr/Ne） | 4N/5N5/6N | Gas | Cylinder | 47L 14Mpa Diss728 |
| 2 | Laser Gas（1.25%Kr/Ne） | 5N5/6N | Gas | Cylinder | 47L 14Mpa Diss728 |
| 3 | Laser Gas（0.95%F2/3.5%Ar/Ne） | 4N/6N/6N | Gas | Cylinder | 47L 14Mpa Diss728 |
| 4 | Laser Gas（3.5%Ar/10ppmXe/Ne） | 6N/5N/6N | Gas | Cylinder | 47L 14Mpa Diss728 |
Precautions for operation: Strictly seal and provide sufficient local exhaust and comprehensive ventilation. Operators must undergo specialized training and strictly adhere to operating procedures. It is recommended that operators wear self priming filter type gas masks (full face masks), sealed gas protective clothing, and rubber gloves. Prevent gas leakage into the air of the workplace. Avoid contact with oxidants. Pay particular attention to avoiding contact with water. Wear a steel cylinder safety helmet and shockproof rubber band during transportation to prevent collision and damage to the cylinder. Equipped with leakage emergency response equipment.
Storage precautions: Store in a cool, dry, and well ventilated warehouse. Keep away from sparks and heat sources. Keep the container sealed. It should be stored separately from oxidants and edible chemicals, and mixed storage should be avoided. The storage area should be equipped with emergency response equipment for leaks. The “Five Double” management system for extremely toxic substances should be strictly implemented.
Transportation precautions
The temperature for shipping high-pressure containers is suitable to be below 40 ℃. It is important to cover them with a cloth during summer transportation to prevent the temperature and internal pressure of the container from increasing.
Before transportation, it is necessary to carefully inspect and ensure that all protective measures and valves are tight without leakage.
When loading and unloading containers for special gases, caution should be exercised and collisions and other impact situations are strictly prohibited.
During transportation, take necessary measures to prevent unnecessary collisions between containers.
To avoid the occurrence of mixed loading of different gases, in special cases, the container heads should be facing opposite directions to each other, and attention should be paid to maintaining loading intervals.
Dangerous goods signs and warning slogans must be hung on vehicles loaded with filling containers.
Carry safety equipment, firefighting equipment, supporting safety facilities, etc.
Carry written instructions and transportation plans, covering the name, composition, content, and safety manual of the content. Written documents must always accompany the actual escort and strictly follow the content of the plan.
The temperature for shipping high-pressure containers is suitable to be below 40 ℃. It is important to cover them with a cloth during summer transportation to prevent the temperature and internal pressure of the container from increasing.
Before transportation, it is necessary to carefully inspect and ensure that all protective measures and valves are tight without leakage.
When loading and unloading containers for special gases, caution should be exercised and collisions and other impact situations are strictly prohibited.
During transportation, take necessary measures to prevent unnecessary collisions between containers.
To avoid the occurrence of mixed loading of different gases, in special cases, the container heads should be facing opposite directions to each other, and attention should be paid to maintaining loading intervals.
Dangerous goods signs and warning slogans must be hung on vehicles loaded with filling containers.
Carry safety equipment, firefighting equipment, supporting safety facilities, etc.
Carry written instructions and transportation plans, covering the name, composition, content, and safety manual of the content. Written documents must always accompany the actual escort and strictly follow the content of the plan.
