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Bis(diethylamino)silane (BDEAS)

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Bis(diethylamino)silane is available in high purity and electronic grade forms suitable for semiconductor processing and other applications.

Product Details

1. Product Introduction

Name: Bis (diethylamino) silane (abbreviated as BDEAS)
Molecular formula: C8H22N2Si

2. Physical and chemical properties

Appearance and characteristics: colorless and transparent liquid
Odor: Organic amine odor
Melting point: < -10 ℃
Boiling point: 188 ℃
Density: 0.804 g/cm ³
Flash point:>30 ° C
Flammability: Highly flammable

3. Storage conditions

Store in a cool, dry, and well ventilated warehouse. Keep the container tightly closed. Prevent physical damage to containers.
Stay away from sparks and heat sources, and avoid contact with air and water sources. Prevent direct sunlight.
It should be stored separately from oxidants, acids, alkalis, water, etc., and should not be stored together.
The lighting and ventilation facilities inside the storage room should be explosion-proof, with switches located outside the warehouse.
Equip corresponding types and quantities of fire-fighting equipment.
Prohibit the use of mechanical equipment and tools that are prone to generating sparks.

4. Safety warning

Product status Inhalation of vapor is toxic. Irritating to the eyes.
Hazardous characteristics
Intense reaction with water releases flammable gases, which can cause combustion and explosion.
Saving method
The product should be placed in a sealed stainless steel container and operated in an inert gas to avoid contact with air. human body
Take protective measures (protective gloves, protective glasses, protective face shields) when operating steel cylinders.
Fire extinguishing methods
Dry yellow sand, stones, fire blankets, and dry powder fire extinguishing agents. Water, carbon dioxide and foam are strictly prohibited.
Leakage emergency response
Isolate the contaminated area of the leakage, evacuate unrelated personnel, stay away from the leakage area, and be upwind. Emergency response personnel should wear
Wear a breathing mask and full body protective clothing to avoid inhaling vapors, smoke, gases, or dust. While ensuring safety
In this case, take measures to prevent further leakage or overflow. When there is a small amount of leakage, dry sand or inert adsorbent materials can be used
Absorb the leaked material and build embankments to control a large amount of leakage. Attached or collected materials should be stored in suitable sealed containers,
And dispose of it according to relevant local laws and regulations. Remove all ignition sources and use fire-resistant tools and explosion-proof equipment.
Health hazards
Inhalation of vapor is toxic. Irritating to the eyes.

5. Product specifications (key elements)

Electronic Grade

Assay Spec Unit
Al 75 ppb
Ca 75 ppb
Cu 75 ppb
Fe 75 ppb
Ga 75 ppb
K 75 ppb
Li 75 ppb
Mg 75 ppb
Mn 75 ppb
Na 75 ppb
Ni 75 ppb
Sn 75 ppb
Ti 75 ppb
Zn 75 ppb
Assay 99.5 %
Purity 99.999 %

 

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