Precursors

Trisilylamine (TSA）

Trimethylsilylamine (chemical formula N(SiH3)3, referred to as TSA), is a colorless, easily hydrolyzed liquid with

Trimethylantimony, with the molecular formula Sb (CH3) 3, is a colorless and transparent liquid

Titanium tetrachloride is an inorganic compound with the chemical formula

Tetramethylsilane is chemically represented as C4H12Si and is a colorless and transparent organic liquid. The

Tertiarybutylphosphine (TBP)

CAS:2501-94-2

Melting point: 4℃

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Octamethylcyclotetrasiloxane is a colorless, transparent or milky white liquid with flammability and no

Hexachloroethylsilane (chemical formula: Si2Cl6) is a colorless liquid that is prone to smoke in humid

Diethyltellurium, chemical formula Te (C2H5) 2, also known as Diethyltelluride or Ethyl telluride in

English name: BIS(CYCLOPENTADIENYL)IRON (CP₂Fe)

Melting point: 173℃

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