What is Titanium tetrachloride?
Titanium tetrachloride is an inorganic compound with the chemical formula TiCl4, mainly used for the production of sponge titanium and titanium dioxide powder, and can also be used as a catalyst. Titanium tetrachloride is a colorless and high-density liquid that easily reacts with moisture and carbon dioxide in the air at room temperature, so it needs to be sealed and stored. Its melting and boiling points are both very low, and the low melting and boiling points are related to weak intermolecular forces. Its molecular structure is tetrahedral and has a high degree of symmetry. Titanium tetrachloride can be dissolved in non-polar toluene and chlorinated hydrocarbons, and the dissolution process may involve the formation of [(C ₆ R ₆) TiCl Å] Å complexes. In addition, titanium tetrachloride can also exothermically react with Lewis base solvents (such as THF) to generate six coordinated adducts. It is worth noting that, similar to vanadium tetrachloride, titanium tetrachloride is one of the few transition metal chlorides that are liquid at room temperature, and its low melting and boiling point is also related to the weak van der Waals force between its molecules. The application of titanium tetrachloride in the semiconductor industry is mainly in the process of manufacturing semiconductor integrated storage, as a liquid phase titanium source material for titanium nitride, titanium dioxide and titanium metal chemical vapor film deposition (CVD). In this process, titanium tetrachloride is an important raw material that can help manufacture high-quality semiconductor devices such as photoelectric sensors, field-effect transistors and solar cells.
Titanium tetrachloride application
As the main application field of electronic grade titanium tetrachloride, electronic grade titanium tetrachloride is used as a reactant in the ALD (atomic layer deposition) process to prepare various titanium based materials.
In the ALD process, titanium tetrachloride and ammonia are two commonly used reactants. Firstly, titanium tetrachloride reacts with ammonia at high temperatures to generate the precursor of titanium based materials – titanium aminochloride. Amino titanium chloride reacts with hydrogen gas to produce titanium based materials. This method can achieve high-purity and highly uniform thin film deposition at low temperatures, and is therefore widely used in the manufacturing of various electronic products, such as semiconductors, microelectronics, optoelectronics, MEMS (Micro Electro Mechanical Systems), and other fields.
In addition to titanium based materials, titanium tetrachloride can also be used in the ALD process to prepare materials such as titanium carbide and titanium nitride. These materials also have characteristics such as high hardness, high melting point, and high chemical stability, and can be used for manufacturing hard alloys, high-temperature structural materials, coatings, etc.
It should be noted that titanium tetrachloride has strong corrosiveness and toxicity, and requires treatment and operation in professional laboratories and equipment. At the same time, the ALD process requires strict control of parameters such as the amount of reactants, reaction temperature, and reaction pressure to ensure that the prepared materials have high quality and reliability.
In the ALD process, titanium tetrachloride and ammonia are two commonly used reactants. Firstly, titanium tetrachloride reacts with ammonia at high temperatures to generate the precursor of titanium based materials – titanium aminochloride. Amino titanium chloride reacts with hydrogen gas to produce titanium based materials. This method can achieve high-purity and highly uniform thin film deposition at low temperatures, and is therefore widely used in the manufacturing of various electronic products, such as semiconductors, microelectronics, optoelectronics, MEMS (Micro Electro Mechanical Systems), and other fields.
In addition to titanium based materials, titanium tetrachloride can also be used in the ALD process to prepare materials such as titanium carbide and titanium nitride. These materials also have characteristics such as high hardness, high melting point, and high chemical stability, and can be used for manufacturing hard alloys, high-temperature structural materials, coatings, etc.
It should be noted that titanium tetrachloride has strong corrosiveness and toxicity, and requires treatment and operation in professional laboratories and equipment. At the same time, the ALD process requires strict control of parameters such as the amount of reactants, reaction temperature, and reaction pressure to ensure that the prepared materials have high quality and reliability.
When using titanium tetrachloride, the following precautions should be taken
When storing and using titanium tetrachloride, special attention should be paid to ventilation to prevent the released vapor from entering the air of the work area, as titanium tetrachloride is a toxic substance.
During the production, use, and storage of titanium tetrachloride, it is necessary to wear protective equipment such as protective clothing, gloves, masks, and goggles to prevent harm to the human body.
If titanium tetrachloride leaks, immediate measures should be taken to prevent diffusion and experts from relevant departments should be contacted in a timely manner for handling.
Titanium tetrachloride should not come into contact with water and alkaline solutions, as it may generate harmful substances.
When using titanium tetrachloride, it is necessary to pay attention to safety operating procedures to avoid accidents.
The transportation and storage of titanium tetrachloride must comply with relevant laws and regulations.
In summary, when using titanium tetrachloride, it is necessary to pay attention to safety and environmental issues, and take necessary preventive measures to avoid adverse effects on human health and the environment.
During the production, use, and storage of titanium tetrachloride, it is necessary to wear protective equipment such as protective clothing, gloves, masks, and goggles to prevent harm to the human body.
If titanium tetrachloride leaks, immediate measures should be taken to prevent diffusion and experts from relevant departments should be contacted in a timely manner for handling.
Titanium tetrachloride should not come into contact with water and alkaline solutions, as it may generate harmful substances.
When using titanium tetrachloride, it is necessary to pay attention to safety operating procedures to avoid accidents.
The transportation and storage of titanium tetrachloride must comply with relevant laws and regulations.
In summary, when using titanium tetrachloride, it is necessary to pay attention to safety and environmental issues, and take necessary preventive measures to avoid adverse effects on human health and the environment.
